Journal Publications:
Kyle J. Solis, Lance R. Williams, Brian S. Swartzentruber,
and Sang M. Han, "Adatom Pair Chain Structures: Metastable Precursors
to Island Formation on SiGe 2xN Alloy," Surf. Sci. (in preparation).
Qiming Li and Sang M. Han, "Growing Hexagonally-Packed Epitaxial
Ge Nanorings by Self-assembled SiO2 Spheres and Ge Touchdown,"
Nano Lett. (in preparation).
Qiming Li, Stephen Hersee, and Sang M. Han, "Understanding selective
growth of Ge on Si over SiO2 during molecular beam epitaxy," J.
Phys. Chem. (in preparation).
Qiming Li, Stephen Hersee, and Sang M. Han, "Morphological Evolution
and Strain Relaxation of Ge Islands Grown on Chemically Oxidized Si
by Molecular Beam Epitaxy," J. Appl. Phys. (in preparation).
Qiming Li and Sang M. Han, "Deposition of Nano-crystalline Silicon
Tungsten Carbide by Hot Wire Chemical Vapor Deposition using Dimethyldichlorosilane,"
J. Cryst. Growth (in preparation).
Henry Gerung, Scott D. Bunge, Timothy J. Boyle, C. Jeffrey Brinker,
and Sang M. Han, "Solution Synthesis of Germanium Nanowires from
the Germanium(II) Precursor Ge[O(di-tert-butyl phenol)]2," J. Am.
Chem. Soc. (in preparation).
Henry Gerung, Dhaval Doshi, C. Jeffrey Brinker, Sang M. Han, and Manuel
Lujan Jr., "Mechanistic Understanding of SiO2 Film Formation During
Evaporation Induced Self Assembly," J. Am. Chem. Soc. (in preparation).
Madhava Kosuri, Henry Gerung, Qiming Li, Sang M. Han, Paulo Herrera,
and Jason Weaver "Vapor Phase Adsorption Kinetics of 1 Decene on
Hydrogenated Si(111)," Surf. Sci. submitted (2005).
Sang M. Han and Eray S. Aydil, "Effects of Feed Gas Composition
on F Concentration, Structure, and Dielectric Constant of Fluorinated
SiO2 Deposited from SiF4/SiH4/O2/Ar Plasmas," Thin Solid Films
submitted (2004).
Qiming Li, Ying-Bing Jiang, Joshua L. Krauss, Huifang Xu, Steven R.
J. Brueck, Stephen Hersee, and Sang M. Han, "Heteroepitaxy of high-quality
Ge on Si by nanoscale seed pads grown through a SiO2 interlayer,"
Proc. SPIE - Int. Soc. Opt. Eng., 5734, 75-82 (2005).
Henry Gerung, Scott D. Bunge, Timothy J. Boyle, C. Jeffrey Brinker,
and Sang M. Han, "Anhydrous Solution Synthesis of High-Quality
Ge Nanocrystals from the Germanium (II) Precursor Ge[N(SiMe3)2]2,"
Chem. Commun., 14, 1914-1916 (2005).
Henry Gerung, Jeffrey C. Brinker, Steve R. J. Brueck, and Sang M. Han,
"In situ real-time monitoring of profile evolution during plasma
etching of mesoporous low-dielectric-constant SiO2," J. Vac. Sci.
Technol. A, 23(2), 347 (2005).
Qiming Li, Ying-Bing Jiang, Huifang Xu, Steve Hersee, and Sang M. Han
"Heteroepitaxy of high quality Ge on Si by nanoscale Ge seeds grown
through a thin layer of SiO2," Appl. Phys. Lett., 85(11), 1928
(2004) and Virtual Journal of Nanoscale Science & Technology, October
4 (2004).
Madhava R. Kosuri, Roya Cones, Qiming Li, Sang M. Han, Bruce C. Bunker,
and Thomas M. Mayer, "Adsorption Kinetics of Alkanethiol Self-Assembly
on Ge(111)," Langmuir, 20(3), 835 (2004).
Qiming Li, Sang M. Han, Steven R. J. Brueck, Stephen Hersee, Ying-Bing
Jiang, and Huifang Xu, "Selective growth of Ge on Si(100) through
vias of SiO2 nanotemplate using solid source molecular beam epitaxy,"
Appl. Phys. Lett., 83(24), 5032 (2003).
Madhava R. Kosuri, Henry Gerung, Sang M. Han, Bruce C. Bunker, and Thomas
M. Mayer, "Vapor-phase Adsorption Kinetics of 1 Decene on H-terminated
Si(100)," Langmuir, 19(22), 9315 (2003).
Dhaval A. Doshi, Alain Gibaud, Valerie Goletto, Mengcheng Lu, Henry
Gerung, Benjamin Ocko, Sang M. Han, and C. Jeffrey Brinker, "Peering
into the self-assembly of surfactant templated thin-film silica mesophases,"
J. Am. Chem. Soc., 125, 11646 (2003).
Sang M. Han, Joseph L. Cecchi, and John J. Russell "HIGH PERFORMANCE
ENGINES: FAST CARS ACCELERATE LEARNING," Chem. Eng. Educ. 37(3),
208 (2003).
Sang M. Han, W. Robert Ashurst, Carlo Carraro, and Roya Maboudian, "Formation
of Alkanethiol Monolayer on Ge(111)," J. Am. Chem. Soc., 123, 2422
(2001).
S. M. Han and E. S. Aydil, "Reasons for lower dielectric constant
of fluorinated SiO2 films," J. Appl. Phys. 83, 2172 (1998).
E. Meeks, R. S. Larson, P. Ho, C. Apblett, S. M. Han, E. Edelberg, and
E. Aydil, "Modeling of SiO2 deposition in high density plasma reactors
and comparisons of model predictions with experimental measurements,"
J. Vac. Sci. Technol. A 16, 544 (1998).
S. M. Han and E. S. Aydil, "Structure and chemical composition
of fluorinated SiO2 films deposited using SiF4/O2 plasmas," J.
Vac. Sci. Technol. A 15, 2893 (1997).
S. M. Han and E. S. Aydil, "Silanol concentration depth profiling
during plasma deposition of SiO2 using multiple internal reflection
infrared spectroscopy," J. Electrochem. Soc. 144, 3963 (1997).
S. M. Han and E. S. Aydil, "Detection of combinative infrared absorption
bands in thin silicon dioxide films," Appl. Phys. Lett. 70, 3269
(1997).
S. M. Han and E. S. Aydil, "Plasma and surface diagnostics during
plasma-enhanced chemical vapor deposition of SiO2 from SiH4/O2/Ar discharges,"
Thin Solid Films 290 - 291, 427 (1996).
S. M. Han and E. S. Aydil, "Study of surface reactions during plasma
enhanced chemical vapor deposition of SiO2 from SiH4, O2, and Ar,"
J. Vac. Sci. Technol. A 14, 2062 (1996).
Contributed/Invited Papers
Stephen Hersee, Sang M. Han, Xin Yu Sun, Xin Wang, and Qiming Li, "Nanoheteroepitaxy:
The Use of Compliant Nanostructures to Accommodate Large Lattice Mismatch
in Semiconductor Heterostructures," The 11th European Workshop
on Metalorganic Vapor Phase Epitaxy, Lausanne, Switzerland (June 5th-8th,
2005).
Qiming Li, Joshua L. Krauss, Stephen Hersee, and Sang M. Han, "Understanding
of Surface Phenomena Responsible for the Selective Growth of Ge on Si
over SiO2 During Molecular Beam Epitaxy," Spring MRS Meeting, San
Francisco, CA (March 30, 2005).
Henry Gerung, Scott D. Bunge, Timothy J. Boyle, C. Jeffrey Brinker,
and Sang M. Han, "Synthesis of Germanium Nanocrystals and Nanowires
via Ge(II) Precursors," Spring MRS Meeting, San Francisco, CA (March
31, 2005).
(Invited) Sang M. Han, "Micro to Atomic Scale Interfacial Science
and Engineering on Si and Ge Based Systems," University of Massachusetts
- Amherst, MA (March 1, 2005).
(Invited) Sang M. Han, "Molecular beam epitaxy of high-quality
Ge on Si by self-directed "touchdown" of nanoscale seed pads
through a thin SiO2," SPIE Photonics West 2005, San Jose, CA (January
24, 2005).
Henry Gerung, Scott D. Bunge, Timothy J. Boyle, C. Jeffrey Brinker,
and Sang M. Han, "Synthesis and Characterization of Germanium Nanocrystals
and Nanowires," 2004 AVS International Symposium, Anaheim, CA (November
16, 2004).
Qiming Li, Darin Leonhardt, Ying-Bing Jiang, Huifang Xu, Steven R. J.
Brueck, Stephen Hersee, and Sang M. Han, "MBE of High-Quality Ge
on Si by "Touchdown" of Nanoscale Ge Seeds," 2004 AVS
International Symposium, Anaheim, CA (November 16, 2004).
Madhava Kosuri, Henry Gerung, Qiming Li, Sang M. Han, Paulo Herrera,
and Jason Weaver, "Vapor Phase Adsorption Kinetics of 1 Decene
on Hydrogenated Si(111)," 2004 AVS International Symposium, Anaheim,
CA (November 16, 2004).
Qiming Li, Darin Leonhardt, Ying-Bing Jiang, Huifang Xu, Stephen Hersee,
and Sang M. Han, "MBE of High-Quality Ge on Si by "Touchdown"
of Nanoscale Ge Seeds," AIChE 2004 Annual Meeting, Austin, TX (November
11, 2004).
Madhava Kosuri, Henry Gerung, Qiming Li, Sang M. Han, Paulo Herrera,
and Jason Weaver, "Vapor Phase Adsorption Kinetics of 1 Decene
on Hydrogenated Si(111)," AIChE 2004 Annual Meeting, Austin, TX
(November 9, 2004).
(Invited) Sang M. Han, "Micro to Atomic Scale Surface Science and
Engineering on Si and Ge Based Systems," Los Alamos National Laboratory
(June 28, 2004).
Madhava R. Kosuri, Roya Cone, Qiming Li, Bruce C. Bunker, Thomas M.
Mayer, and Sang M. Han, "Liquid-Phase Self-Assembly of 1-Alkanethiols
and 11-Mercapto-1-Undecanols on Hydrogenated Ge(111)," 40th Annual
New Mexico American Vacuum Society Symposium, Albuquerque, NM (May 18,
2004).
Kyle J. Solis, Brian S. Swartzentruber, and Sang M. Han, "Strain-Mediated
Formation of Adatom-Pair Structures in the Ge/Si(100) Heterosystem,"
40th Annual New Mexico American Vacuum Society Symposium, Albuquerque,
NM (May 18, 2004).
Qiming Li, Darin Leonhardt, Ying-Bing Jiang, Huifang Xu, Steven R. J.
Brueck, Stephen Hersee, and Sang M. Han, "Molecular Beam Epitaxy
of High-Quality Ge on Si by Self-directed "Touchdown" of Nanoscale
Seed Pads," 40th Annual New Mexico American Vacuum Society Symposium,
Albuquerque, NM (May 17, 2004).
Henry Gerung, Scott D. Bunge, Timothy J. Boyle, C. Jeffrey Brinker,
and Sang M. Han, "Synthesis and Characterization of Germanium Nanocrystals,"
40th Annual New Mexico American Vacuum Society Symposium, Albuquerque,
NM (May 17, 2004).
(Invited) Sang M. Han, "Micro to Atomic Scale Surface Science and
Engineering on Si and Ge Based Systems," University of Florida,
Gainesville, FL (April 19, 2004).
Qiming Li, Darin Leonhardt, Ying-Bing Jiang, Huifang Xu, Steven R. J.
Brueck, Stephen Hersee, and Sang M. Han (speaker), "MBE of high-quality
Ge on Si through vias of SiO2 nanotemplate and by self-directed "touchdown"
of nanoscale seed pads," Materials Research Society 2004 Spring
Meeting, San Francisco (April 15, 2004).
(Invited) Sang M. Han, "Micro to Atomic Scale Surface Science and
Engineering on Si and Ge Based Systems," University of California
Santa Barbara, Santa Barbara, CA (April 1, 2004).
(Invited) Sang M. Han, "Micro to Atomic Scale Surface Science and
Engineering on Si and Ge Based Systems," University of California
Los Angeles, Los Angeles, CA (February 27, 2004).
(Invited) Sang M. Han, "Micro to Atomic Scale Surface Science and
Engineering on Si and Ge Based Systems," Sandia National Laboratories,
Albuquerque, NM (February 12, 2004).
(Invited) Sang M. Han, "Micro to Atomic Scale Surface Science and
Engineering on Si and Ge Based Systems," Center for High Technology
Materials, University of New Mexico, Albuquerque, NM (February 6, 2004).
(Invited) Sang M. Han, "Micro to Atomic Scale Surface Science and
Engineering on Si and Ge Based Systems," Drexel University, Philadelphia,
PA (November 24, 2003).
(Invited) Sang M. Han, "Micro to Atomic Scale Surface Science and
Engineering on Si and Ge Based Systems," Lam Research Corporation,
Fremont, CA (November 20, 2003).
Madhava R. Kosuri, Henry Gerung, Qiming Li, Sang M. Han (speaker),"
Vapor-phase Adsorption Kinetics of 1-Decene on H-terminated Si(100),"
AIChE 2003 Annual Meeting, San Francisco (November 19, 2003).
Henry Gerung, C. Jeffrey Brinker, Steve R. J. Brueck, and Sang M. Han
(speaker), "In Situ Real Time Monitoring of Profile Evolution During
Plasma Etching," AIChE 2003 Annual Meeting, San Francisco (November
18, 2003).
Sang M. Han, "Tips for Preparing for NSF CAREER," AIChE 2003
Annual Meeting, San Francisco (November 17, 2003).
Henry Gerung, C. Jeffrey Brinker, Steve R. J. Brueck, and Sang M. Han,
"In Situ Real Time Monitoring of Profile Evolution During Plasma
Etching," AVS 50th International Symposium, Baltimore, MD (November
6, 2003).
Madhava R. Kosuri (poster presenter), Roya Cone, Qiming Li, Sang M.
Han, Bruce C. Bunker, and Thomas M. Mayer, "Adsorption Kinetics
of Alkanethiol Self-Assembly on Hydrogenated Ge(111)," AVS 50th
International Symposium, Baltimore, MD (November 5, 2003).
Madhava R. Kosuri, Henry Gerung, Qiming Li, Sang M. Han (speaker), Bruce
C. Bunker, and Thomas M. Mayer, "Vapor-phase Adsorption Kinetics
of 1-Decene on H-Terminated Si(100)," AVS 50th International Symposium,
Baltimore, MD (November 4, 2003).
(Invited) Sang M. Han, "Micro to Atomic Scale Surface Science and
Engineering on Si and Ge Based Systems," Seoul National University,
Seoul, Korea (May 15, 2003).
(Invited) Sang M. Han, "Micro to Atomic Scale Surface Science and
Engineering on Si and Ge Based Systems," Seung-Kyun-Kwan University,
Suwon, Korea (May 14, 2003).
Qiming Li and Sang M. Han, "Characterization of Ionic Species in
SiH4/Ar ECR Plasma and Role of Ions on Si Film Deposition," 39th
Annual New Mexico American Vacuum Society Symposium, Albuquerque, NM
(April 30, 2003).
Henry Gerung, Jeffrey C. Brinker, Steven R. J. Brueck, and Sang M. Han,
"In-situ Real-time Monitoring of Profile Evolution During Plasma
Etching," 39th Annual New Mexico American Vacuum Society Symposium,
Albuquerque, NM (April 30, 2003).
Madhava R. Kosuri, Henry Gerung, Qiming Li, Sang M. Han, Bruce C. Bunker
and Thomas M. Mayer, "Vapor-phase Adsorption Kinetics of 1-Decene
on H-terminated Si(100)," 39th Annual New Mexico American Vacuum
Society Symposium, Albuquerque, NM (April 29, 2003).
Henry Gerung, Dhaval Doshi, C. Jeffrey Brinker, and Sang M. Han (speaker),
"In Situ Real Time Monitoring of Low-k Mesoporous SiO2 During Evaporation
Induced Self-Assembly and Plasma Etching," AIChE 2002 Annual Meeting,
Indianapolis, IN (November 8, 2002).
Henry Gerung, Dhaval Doshi, C. Jeffrey Brinker, and Sang M. Han (speaker),
"In Situ Real Time Monitoring of Low-k Mesoporous SiO2 During Evaporation
Induced Self-Assembly and Plasma Etching," AVS 49th International
Symposium, Denver, CO (November 7, 2002).
Sang M. Han, "HIGH PERFORMANCE ENGINES: FAST CARS ACCELERATE LEARNING,"
ASEE Summer School for Chemical Engineering Faculty Poster Competition
and Winner, Boulder, CO (July 27 - August 2, 2002).
Henry Gerung, C. Jeffrey Brinker, and Sang M. Han (speaker), "In
Situ Real Time Monitoring of Low-k Mesoporous SiO2 During Evaporation
Induced Self-Assembly and Plasma Etching," 38th Annual New Mexico
American Vacuum Society Symposium, Albuquerque, NM (May 15, 2002).
Sang M. Han, "In Situ Real Time Investigation of High-Aspect-Ratio
Porous Solgel Silica Features During Plasma Etching," Center for
Micro-Engineered Materials (CMEM) Annual Industrial Advisory Board (IAB)
Meeting, Albuquerque, NM (March 20, 2002).
(Invited) Sang M. Han, "Fundamental Plasma Physics and Chemistry
to Real Life Plasma Tools," Intel Annual Lecture Series, Intel
Corporation, Rio Rancho, NM (November 27, 2001).
Sang M. Han, "Research Direction and Topics: In Situ Real Time
Monitoring of Interfacial Phenomena," Center for Micro-Engineered
Materials (CMEM) Annual Industrial Advisory Board (IAB) Meeting, Albuquerque,
NM (February 27, 2001).
Sang M. Han (speaker) and Eray S. Aydil, "Effects of Feed Gas Composition
on Impurity Concentration, Structure, and Dielectric Constant of Fluorinated
SiO2 Films Deposited from SiF4/SiH4/O2/Ar Plasmas," Emerging Technologies
2000, American Vacuum Society - New Mexico Chapter, Albuquerque, NM
(May 25, 2000).
(Invited) Sang M. Han, "Plasma enhanced chemical vapor deposition
of SiO2 and fluorinated SiO2 films," University of New Mexico,
Albuquerque, NM (February 4, 1999).
(Invited) Sang M. Han, "Plasma enhanced chemical vapor deposition
of SiO2 and fluorinated SiO2 films," Reunión de Invierno
"New Horizons in Materials Science" sponsored by Universidad
Nacional Autónoma de México, Querétaro, Mexico
(January 18, 1999).
(Invited) Sang M. Han, "Plasma enhanced chemical vapor deposition
of SiO2 and fluorinated SiO2 films," National Institute of Standards
and Technology, Gaithersburg, MD (March 27, 1998).
(Invited) Sang M. Han, "Plasma enhanced chemical vapor deposition
of SiO2 and fluorinated SiO2 films," Lucent Technologies - Bell
Labs, Murray Hill, NJ (March 26, 1998).
(Invited) Sang M. Han, "Plasma enhanced chemical vapor deposition
of SiO2 and fluorinated SiO2 films," Stanford University, Stanford,
CA (February 4, 1998).
Sang M. Han (speaker) and Eray S. Aydil, "Plasma enhanced chemical
vapor deposition of fluorinated silicon dioxide films," AIChE Annual
Meeting, Los Angeles, CA (November 1997).
S. M. Han (speaker) and E. S. Aydil, "Structure and chemical composition
of fluorinated SiO2 films deposited using SiF4/O2 and SiF4/SiH4/O2 plasmas,"
44th National Symposium of the American Vacuum Society, San Jose, CA
(October 1997).
R. S. Larson, E. Meeks, P. Ho, C. Apblett, S. M. Han, E. A. Edelberg,
and E. S. Aydil, "Modeling of silicon dioxide deposition in high
density plasma reactors and comparison of model predictions with experimental
measurements," 44th National Symposium of the American Vacuum Society,
San Jose, CA (October 1997).
S. M. Han (speaker) and E. S. Aydil, "Structure and chemical composition
of fluorinated SiO2 films deposited using SiF4/O2 and SiF4/SiH4/O2 plasmas,"
30th Annual Southern California Chapter American Vacuum Society Symposium,
Anaheim, CA (September 1997).
C. Sone, E. Yoon, S. M. Han, and E. S. Aydil, "Optical emission
spectroscopy study on the low temperature growth of GaN by remote plasma
enhanced chemical vapor deposition," Joint International Meetings
of the Electrochemical Society (192nd) and the International Society
of Electrochemistry (48th), Symposium on Compound Semiconductors III-V
Nitride Materials and Processes, Paris, France (September 1997).
E. S. Aydil and S. M. Han, "Plasma enhanced chemical vapor deposition
of silicon dioxide: factors controlling the silanol incorporation,"
AIChE Annual Meeting, Chicago, IL (November 1996).
(Invited) S. M. Han (speaker) and E. S. Aydil, "Gas phase and surface
diagnostics during plasma enhanced chemical vapor deposition of SiO2
through SiH4/O2/Ar discharges," Hitachi Central Research Center,
Japan (August 1996).
S. M. Han (speaker) and E. S. Aydil, "Gas phase and surface diagnostics
during plasma enhanced chemical vapor deposition of SiO2 through SiH4/O2/Ar
discharges," 189th Annual Electrochemical Society Meeting, Plasma
Processing XI, Los Angeles, CA (May 1996).
S. M. Han (speaker) and E. S. Aydil, "Plasma and surface diagnostics
during plasma enhanced chemical vapor deposition of SiO2 from SiH4/O2/Ar
discharge," International Conference on Metallurgical Coatings
and Thin Films, San Diego, CA (April 1996).
S. M. Han and E. S. Aydil, "An in situ real time investigation
of surface processes relevant to plasma enhanced chemical vapor deposition
of SiO2 from SiH4/O2/Ar discharges," 42nd National Symposium of
the American Vacuum Society, Minneapolis, MN (October 1995).
Patents
Sang M. Han, "Surface Corrugation on Internal Reflection Infrared
Waveguide for Enhanced Detection Sensitivity and Selectivity,"
U.S. Patent Application was filed on April 8, 2005.
Sang M. Han, "Nanoheteroepitaxy of Ge on Si as a Foundation for
Group III-V and II-VI Integration," Provisional U.S. Patent Application
was filed on October 28, 2004.
Qiming Li and Sang M. Han, "Threading-dislocation-free nanoheteroepitaxy
of Ge on Si using self-directed touch-down of Ge through a thin SiO2
layer," U.S. Patent Application was filed on September 8, 2004.
Steve R. J. Brueck, Sang M. Han, Cornelius F. Ivory, Gabriel P. Lopez,
and Dimiter N. Petsev, "Nanofluidics for Bioseparation and Analysis,"
Provisional U.S. Patent Application was filed on July 19, 2004.
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